Model
M2030V
M2030A
Range(N2)
5sccm ~ 35000sccm
5sccm ~ 35000sccm
Response Time
¡Â3 sec
¡Â3 sec
Accuracy
¡¾1% FS
¡¾1% FS
Repeatability
¡¾0.25% FS
¡¾0.25% FS
In/Out Signal
0~5 Vdc
0~5 Vdc OR 4~20 mA
Supply Power
¡¾15 Vdc, 350mA
¡¾15 Vdc, 350mA
Max. Operating Pressure
¡Â90 bar
¡Â90 bar
Max. Operating Temp
0~50 ¡ÆC
0~50 ¡ÆC
Leak Rate
1*10E-9 atm cc/sec
1*10E-9 atm cc/sec
Control Range
5 ~ 100% for max range
5 ~ 100% for max range
Total Industry
Precise Gas Blending and Analyzing
Gas Injection for Surface Treatment Industry (PVD, CVD, Reactor and etc)
Semiconductor Industry
Component Leak Detection
Research and Development
High Pressure Industry
Optical Fiber
Fuel Cell
Reactor System
Gas Mixing System
Laboratory