Model
M2030V
M2030A
  Range(N2)   5sccm ~ 35000sccm   5sccm ~ 35000sccm
  Response Time   ¡Â3 sec   ¡Â3 sec
  Accuracy   ¡¾1% FS   ¡¾1% FS
  Repeatability   ¡¾0.25% FS   ¡¾0.25% FS
  In/Out Signal   0~5 Vdc   0~5 Vdc OR 4~20 mA
  Supply Power   ¡¾15 Vdc, 350mA   ¡¾15 Vdc, 350mA
  Max. Operating Pressure   ¡Â90 bar   ¡Â90 bar
  Max. Operating Temp   0~50 ¡ÆC   0~50 ¡ÆC
  Leak Rate   1*10E-9 atm cc/sec   1*10E-9 atm cc/sec
  Control Range   5 ~ 100% for max range   5 ~ 100% for max range
 
Total Industry
Precise Gas Blending and Analyzing
Gas Injection for Surface Treatment Industry (PVD, CVD, Reactor and etc)
Semiconductor Industry
Component Leak Detection
Research and Development
High Pressure Industry
Optical Fiber
Fuel Cell
Reactor System
Gas Mixing System
Laboratory